VUV Technology

VUV technology – Using Light to Create New Surfaces

© Fraunhofer IFAM

XERADEX® excimer lamp

VUV light sources – which emit vacuum ultraviolet radiation (VUV radiation) – of wavelength below 200 nm, have sufficient photon energy to break bonds in a material. By this way, reactive molecule fragments are generated which can react with one another or with the surrounding atmosphere. These effects can be utilized for surface modification:

  • Surface cleaning 
  • Surface activation
  • Surface coating (LightPLAS coating technology)

Suitable VUV sources include incoherent excimer lamps and low pressure mercury irradiation sources. These systems describe the technical basis  for developing VUV-based processes for surface modification and for designing suitable plants. A particularly attractive feature of excimer lamps is their high energy efficiency. These light sources emit almost exclusively in the VUV spectral region and at the same time require very low input power compared with other pre-treatment techniques. In addition, no additional chemicals are required for cleaning and activation, meaning that VUV technology contributes to protecting the environment.


Example applications